End-fire injection of light into high-Q silicon microdisks
نویسندگان
چکیده
منابع مشابه
Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment.
Using a combination of resist reflow to form a highly circular etch mask pattern and a low-damage plasma dry etch, high-quality-factor silicon optical microdisk resonators are fabricated out of silicon-on-insulator (SOI) wafers. Quality factors as high as Q = 5x10(6) are measured in these microresonators, corresponding to a propagation loss coefficient as small as alpha ~ 0.1 dB/cm. The differe...
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ژورنال
عنوان ژورنال: Optica
سال: 2018
ISSN: 2334-2536
DOI: 10.1364/optica.5.000612